IEEE - Institute of Electrical and Electronics Engineers, Inc. - Data mining to detect ion source failures in varian VIIsta implanters

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

Author(s): Sidda Reddy Kurakula ; Joseph Trujillo
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2016
Conference Location: Saratoga Springs, NY, USA
Conference Date: 16 May 2016
Page(s): 149 - 150
ISBN (Electronic): 978-1-5090-0270-2
ISSN (Electronic): 2376-6697
DOI: 10.1109/ASMC.2016.7491148
Regular:

Ion source replacement is the most frequent maintenance activity on an ion implanter, impacting both productivity and consumable costs. Quality of parts and quality of build are essential to... View More

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