IEEE - Institute of Electrical and Electronics Engineers, Inc. - Laser-induced diode linking for wafer-scale integration

Author(s): S.S. Cohen ; P.W. Wyatt ; G.H. Chapman ; J.M. Canter
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 1988
Volume: 35
Page Count: 18
Page(s): 1,533 - 1,550
ISSN (Paper): 0018-9383
ISSN (Online): 1557-9646
DOI: 10.1109/16.2588
Regular:

Diodes formed by ion implantation and diffusion in a conventional CMOS process are positioned such that when desired they may be used to obtain an electrical link between two otherwise separate... View More

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