IEEE - Institute of Electrical and Electronics Engineers, Inc. - High-K thin films as dielectric transducers for flexural M/NEMS resonators

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Cecile Fuinel ; Khadim Daffe ; Adrian Laborde ; Olivier Thomas ; Laurent Mazenq ; Liviu Nicu ; Thierry Leichle ; Bernard Legrand
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 1,193 - 1,196
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421850
Regular:

We show that a nanometer-thick high-K material can be used as an electromechanical transducer to actuate the flexural mode of micro/nanoresonators. In this study, a 15 nm silicon nitride... View More

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