IEEE - Institute of Electrical and Electronics Engineers, Inc. - Sputtering deposition of multi-layer Pb(Zr, Ti)O3 thin films for low voltage actuators

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Ryo Sano ; Kensuke Kanda ; Junichi Inoue ; Takayuki Fujita ; Kazusuke Maenaka
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 1,173 - 1,174
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421845
Regular:

Multimorph structure of Pb(Zr, Ti)O3 (PZT) thin films by using sputtering deposition, which is compatible with batch-fabrication, was realized for the applications of low voltage... View More

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