IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and implementation of 3D "Disk-shaped" MEMS vector hydrophone for acoustic orientation

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Renxin Wang ; Yuan Liu ; Wei Xu ; Mingran Liu ; Bing Bai ; Guojun Zhang ; Chenyang Xue ; Jun Liu ; Wendong Zhang ; Binzhen Zhang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 1,094 - 1,097
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421825
Regular:

In order to obtain the explicit underwater orientation, high-sensitivity 3D "Disk-structure" MEMS Vector Hydrophone (3DDVH) is proposed, which realizes tri-axial acoustic pressure sensing via... View More

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