IEEE - Institute of Electrical and Electronics Engineers, Inc. - Aln-on-SOI platform-based MEMS hydrophone with ultra-low operation frequency and ultra-high noise resolution

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Jinghui Xu ; Xiaolin Zhang ; Sanchitha N. Fernando ; Srinivas Merugu ; Kevin Tshunchuan Chai ; Alex Yuandong Gu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 1,086 - 1,089
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421823
Regular:

This paper reports a piezoelectric aluminum nitride (AlN) based MEMS hydrophone with ultra-low operation frequency and ultra-high noise resolution. The hydrophone was fabricated on a cavity SOI... View More

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