IEEE - Institute of Electrical and Electronics Engineers, Inc. - The CMOS-MEMS 3-axis capacitive accelerometer to meet the commercial specifications

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Ming-Han Tsai ; Chih-Ming Sun ; Wei-Jhih Mao ; Weileun Fang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 1,002 - 1,005
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421802
Regular:

This study presents the world first post-CMOS 3-axis accelerometer to meet the commercial specifications using the 0.18μm standard CMOS process and one-step vapor HF post CMOS process. The... View More

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