IEEE - Institute of Electrical and Electronics Engineers, Inc. - Inductive CMOS MEMS accelerometer with integrated variable inductors

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Yi Chiu ; Hao-Chiao Hong ; Chia-Wei Lin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 974 - 977
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421795
Regular:

This paper reports an inductive CMOS MEMS accelerometer with integrated variable inductors as the position-sensing elements. Without conventional sensing comb fingers, the dependence of device... View More

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