IEEE - Institute of Electrical and Electronics Engineers, Inc. - A CMOS-integrated four-quadrant symmetric micro-g accelerometer

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Weibin Zhu ; Yafan Zhang ; George Meng ; Casey S. Wallace ; Navid Yazdi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 926 - 929
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421783
Regular:

This paper reports a CMOS-integrated MEMS microgravity accelerometer that implements a novel four-quadrant symmetric device structure with a full-bridge capacitive output. A robust... View More

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