IEEE - Institute of Electrical and Electronics Engineers, Inc. - A nanomachined torque sensor with ultrahigh sensitivity

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Jian Guo Huang ; Hong Cat ; Yuan Dong Gu ; Bin Dong ; Jun Feng Song ; Zhen Chuan Yang ; Yu Feng Jin ; Yu Long Hao ; Jiu Hui Wu ; Tian Ning Chen ; Dim-Lee Kwong ; Ai Qun Liu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 858 - 861
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421765
Regular:

This paper reports, for the first time, a novel nanoscale torque sensor in a split ring resonator. The mechanical resonator is embedded into ring resonator and separated by 200 nm from the... View More

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