IEEE - Institute of Electrical and Electronics Engineers, Inc. - Low-pressure gas sensor exploiting the Knudsen thermal force: DSMC modeling and experimental validation

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Andrew D. Strongrich ; Aaron J. Pikus ; Israel B. Sebastiao ; Dimitrios Peroulis ; Alina A. Alexeenko
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 828 - 831
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421757
Regular:

We present performance modeling and experimental validation of a novel MEMS vacuum gas sensor based on the Knudsen thermal force. Direct simulation Monte Carlo (DSMC) modeling of thermally-driven... View More

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