IEEE - Institute of Electrical and Electronics Engineers, Inc. - Single-chip mass flow controller with integrated coriolis flow sensor and proportional control valve

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Jarno Groenesteijn ; Dennis Alveringh ; Maarten S. Groen ; Remco J. Wiegerink ; Joost C. Lotters
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 788 - 791
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421747
Regular:

We have designed, fabricated and tested the, to our knowledge, first ever single-chip mass flow controller with an integrated Coriolis mass flow sensor and a proportional control valve. A minimum... View More

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