IEEE - Institute of Electrical and Electronics Engineers, Inc. - All-SIC surface micromachined nanoreactor for in-situ transmission electron microscopy

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Bruno Morana ; Cinzia Silvestri ; J. Fredrik Creemer ; Pasqualina M. Sarro
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 753 - 756
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421738
Regular:

We present a silicon carbide (SiC) based surface micromachined nanoreactor for in-situ characterization of reactions between solid nanostructured materials and gasses in transmission electron... View More

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