IEEE - Institute of Electrical and Electronics Engineers, Inc. - Silicon carbide (SiC) micromechanical self-sustained Oscillator operating in liquid

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Hao Tang ; Hao Jia ; Philip X.-L. Feng
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 714 - 717
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421727
Regular:

This digest paper reports on the first experimental demonstration of self-sustained feedback oscillators referenced to silicon carbide (SiC) beam micromechanical resonators operating in liquid,... View More

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