IEEE - Institute of Electrical and Electronics Engineers, Inc. - Damping directly impacts flicker frequency noise of piezoelectric aluminum nitride resonators

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Hoe Joon Kim ; Jeronimo Segovia-Fernandez ; Gianluca Piazza
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 667 - 670
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421714
Regular:

This paper presents an analysis on the effect of damping on flicker frequency (1/f) noise of 1.1 GHz aluminum nitride (AlN) contour mode resonators (CMR). A total of 52 different AlN-CMRs are... View More

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