IEEE - Institute of Electrical and Electronics Engineers, Inc. - Vacuum bouncing dynamics dominated by van der Waals forces in MEMS relays

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): B. Ma ; Z. You ; Y. Ruan
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 593 - 596
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421695
Regular:

This paper reports a MEMS relay with high reliability, in which van der Waals forces will be used, for the first time, to significantly suppress the vacuum contact bouncing. The dynamic analysis... View More

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