IEEE - Institute of Electrical and Electronics Engineers, Inc. - Preparation of graphene-nickel nanocomposite for durable micromirror application

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Jinhua Li ; Zhonglie An ; Takahito Ono
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 554 - 557
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421685
Regular:

This paper reports the fabrication of a silicon micromirror with graphene-nickel (Ni) nanocomposite beams, and evaluate the mechanical stability of the mirror in terms of resonant frequency. A... View More

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