IEEE - Institute of Electrical and Electronics Engineers, Inc. - Characterization of sputtered nickel-titanium shape memory alloy and microfabricated thermal actuators

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Cory R. Knick ; Merric D. Srour ; Christopher J. Morris
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 524 - 527
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421677
Regular:

We report on the microfabrication and thermal characterization of shape memory alloy (SMA) thin film nickel-titanium (NiTi) bimorph cantilever actuators, which actuate between nearly flat and 1.2... View More

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