IEEE - Institute of Electrical and Electronics Engineers, Inc. - Processing of platinum electrodes for parylene-C based neural probes

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Xiao Chuan Ong ; Mats Forssell ; Gary K. Fedder
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 509 - 512
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421673
Regular:

This paper reports a method to improve the electrochemical properties of platinum electrodes fabricated using parylene-C based processes. It is found that the use of O2 reactive-ion... View More

Advertisement