IEEE - Institute of Electrical and Electronics Engineers, Inc. - Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35++m CMOS MEMS technology

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Wei Xu ; Bo Gao ; Shenhui Ma ; Anping Zhang ; Yi Chiu ; Yi-Kuen Lee
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 189 - 192
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421590
Regular:

In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow (T2MCF) sensor by using a commercial 0.35μm 2P4M CMOS MEMS technology is reported. For... View More

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