IEEE - Institute of Electrical and Electronics Engineers, Inc. - All-electrical readout of atomically-thin MoS2 nanoelectromechanical resonators in the VHF band

2016 IEEE 29th International Conference on Micro-Electro-Mechanical Systems (MEMS)

Author(s): Rui Yang ; Zenghui Wang ; Philip X.-L Feng
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: Shanghai, China
Conference Date: 24 January 2016
Page(s): 59 - 62
ISBN (Electronic): 978-1-5090-1973-1
ISBN (USB): 978-1-5090-1972-4
DOI: 10.1109/MEMSYS.2016.7421557
Regular:

We report on the first mono-, bi-, and tri-layer (1L, 2L, and 3L) molybdenum disulfide (MoS2) nanoelectro-mechanical resonators with all-electrical excitation and detection. These... View More

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