IEEE - Institute of Electrical and Electronics Engineers, Inc. - 28.7 CMOS monolithic airborne-particulate-matter detector based on 32 capacitive sensors with a resolution of 65zF rms

2016 IEEE International Solid-State Circuits Conference (ISSCC)

Author(s): Pietro Ciccarella ; Marco Carminati ; Marco Sampietro ; Giorgio Ferrari
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2016
Conference Location: San Francisco, CA, USA
Conference Date: 31 January 2016
Page(s): 486 - 488
ISBN (Electronic): 978-1-4673-9467-3
ISBN (Paper): 978-1-4673-9466-6
ISSN (Electronic): 2376-8606
DOI: 10.1109/ISSCC.2016.7418119
Regular:

In this paper, a CMOS monolithic system for the detection through a capacitive measurement of the airborne PM deposited on the surface of the chip is demonstrated. The sensor, whose electrodes are... View More

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