IEEE - Institute of Electrical and Electronics Engineers, Inc. - Suppression of parasitic resonance in piezoresistively transduced longitudinal mode MEMS resonators

2009 IEEE International Ultrasonics Symposium

Author(s): Yan, J. ; Lin, A.T.-H. ; Seshia, A.A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2009
Conference Location: Rome, Italy, Italy
Conference Date: 20 September 2009
Page(s): 2,149 - 2,152
ISBN (CD): 978-1-4244-4390-1
ISBN (Paper): 978-1-4244-4389-5
ISSN (CD): 1948-5719
ISSN (Electronic): 1948-5727
ISSN (Paper): 1948-5719
DOI: 10.1109/ULTSYM.2009.5441572
Regular:

This paper demonstrates the suppression of parasitic resonance in a piezoresistively transduced [1-3] longitudinal mode MEMS resonator, wherein beams are electrostatically excited in a combined... View More

Advertisement