IEEE - Institute of Electrical and Electronics Engineers, Inc. - Hysteresis modeling and compensation for an XY micropositioning stage with model reference adaptive control

2009 Joint 48th IEEE Conference on Decision and Control (CDC) and 28th Chinese Control Conference (CCC)

Author(s): Yangmin Li ; Qingsong Xu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2009
Conference Location: Shanghai, China, China
Conference Date: 15 December 2009
Page(s): 5,580 - 5,585
ISBN (CD): 978-1-4244-3872-3
ISBN (Paper): 978-1-4244-3871-6
ISSN (CD): 0191-2216
ISSN (Paper): 0191-2216
DOI: 10.1109/CDC.2009.5399586
Regular:

In this paper, a model reference adaptive controller (MRAC) is designed for a piezo-driven XY parallel micropositioning stage to compensate for the hysteresis effects aiming at a sub-micron... View More

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