IEEE - Institute of Electrical and Electronics Engineers, Inc. - Simultaneous regulation of film thickness, surface roughness and porosity in a multiscale thin film growth process

2009 Joint 48th IEEE Conference on Decision and Control (CDC) and 28th Chinese Control Conference (CCC)

Author(s): Gangshi Hu ; Xinyu Zhang ; Orkoulas, G. ; Christofides, P.D.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2009
Conference Location: Shanghai, China, China
Conference Date: 15 December 2009
Page(s): 2,387 - 2,394
ISBN (CD): 978-1-4244-3872-3
ISBN (Paper): 978-1-4244-3871-6
ISSN (CD): 0191-2216
ISSN (Paper): 0191-2216
DOI: 10.1109/CDC.2009.5399542
Regular:

This work focuses on simultaneous regulation of film thickness, surface roughness and porosity in a multiscale model of a thin film growth process using the inlet precursor concentration as the... View More

Advertisement