IEEE - Institute of Electrical and Electronics Engineers, Inc. - Modeling and analysis of the coupling effect for one kind of coarse-fine stages

2009 IEEE International Conference on Control and Automation (ICCA)

Author(s): Yang Yibo ; Yin Wensheng ; Zhu Yu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2009
Conference Location: Christchurch, New Zealand, New Zealand
Conference Date: 9 December 2009
Page(s): 2,011 - 2,014
ISBN (CD): 978-1-4244-4707-7
ISBN (Paper): 978-1-4244-4706-0
DOI: 10.1109/ICCA.2009.5410323
Regular:

Coarse-fine structure makes the stages achieve long stroke and high precision performance easier than single drivers. So this structure is wide adopted in precision motion stages, which will be... View More

Advertisement