IEEE - Institute of Electrical and Electronics Engineers, Inc. - Deep micromachining of poly-ethylene terephthalate for plastic MEMS applications

2009 International Semiconductor Device Research Symposium (ISDRS)

Author(s): Pajouhi, H. ; Mohajerzadeh, S. ; Nayeri, F. ; Parsinejad, F. ; Sanaee, Z.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2009
Conference Location: College Park, MD, USA, USA
Conference Date: 9 December 2009
Page(s): 1 - 2
ISBN (CD): 978-1-4244-6031-1
ISBN (Paper): 978-1-4244-6030-4
DOI: 10.1109/ISDRS.2009.5378266
Regular:

Poly ethylene terephatale or PET is an important plastic for MEMS applications. Deep vertical etching of PET is possible using a di-methyl-formamide (DMF) solution assisted by ultra-violet... View More

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