IEEE - Institute of Electrical and Electronics Engineers, Inc. - The ITRS metrology roadmap

2009 International Semiconductor Device Research Symposium (ISDRS)

Author(s): Diebold, A.C.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2009
Conference Location: College Park, MD, USA, USA
Conference Date: 9 December 2009
Page(s): 1 - 2
ISBN (CD): 978-1-4244-6031-1
ISBN (Paper): 978-1-4244-6030-4
DOI: 10.1109/ISDRS.2009.5378220
Regular:

The 2009 International Technology Roadmap for Semiconductors (ITRS) will be published in late 2009. The 2009 ITRS includes the Metrology Roadmap which is based on the Front End Processes,... View More

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