IEEE - Institute of Electrical and Electronics Engineers, Inc. - Miniaturized homo-polar rotating liquid device on Si substrates

2009 International Semiconductor Device Research Symposium (ISDRS)

Author(s): Sanaee, Z. ; Mohajerzadeh, S. ; Miladi, H. ; Araghchini, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2009
Conference Location: College Park, MD, USA, USA
Conference Date: 9 December 2009
Page(s): 1 - 2
ISBN (CD): 978-1-4244-6031-1
ISBN (Paper): 978-1-4244-6030-4
DOI: 10.1109/ISDRS.2009.5378094
Regular:

We report the preliminary results on the fabrication of a miniaturized liquid-based homopolar micro-motor structure. The fabrication has been carried out on Si wafers by means of a deep etching of... View More

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