IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication technique for arrays of Germanium-on-Nothing nanowires

2009 International Semiconductor Device Research Symposium (ISDRS)

Author(s): Thomas, P.M. ; Pawlik, D.J. ; Romanczyk, B. ; Freeman, E. ; Rommel, S.L. ; Kurinec, S.K. ; Cheng, Z. ; Li, J. ; Park, J.S. ; Hydrick, J.M. ; Fiorenza, J.G. ; Lochtefeld, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2009
Conference Location: College Park, MD, USA, USA
Conference Date: 9 December 2009
Page(s): 1 - 2
ISBN (CD): 978-1-4244-6031-1
ISBN (Paper): 978-1-4244-6030-4
DOI: 10.1109/ISDRS.2009.5378043
Regular:

Advances in crystal growth techniques are enabling novel structures and circuit designs to scale electronic devices below the present respective technology nodes. These developments have produced... View More

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