IEEE - Institute of Electrical and Electronics Engineers, Inc. - A machine setup model for TFT-LCD cell back-end process

2009 IEEE International Conference on Industrial Engineering and Engineering Management (IEEM)

Author(s): Chang, Y.-C. ; Chen, P.-S. ; Chen, P.-C.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2009
Conference Location: Hong Kong, China, China
Conference Date: 8 December 2009
Page(s): 1,709 - 1,713
ISBN (CD): 978-1-4244-4870-8
ISBN (Paper): 978-1-4244-4869-2
DOI: 10.1109/IEEM.2009.5373144
Regular:

The cell process is the main part of thin-film transistor liquid-crystal display (TFT-LCD), and can be divided into front-end process and back-end process. Since the production machines of the... View More

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