IEEE - Institute of Electrical and Electronics Engineers, Inc. - Heating and photoionization of silicon structures at laser treatments

2009 17th International Conference on Advanced Thermal Processing of Semiconductors (RTP)

Author(s): Bayazitov, R.M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2009
Conference Location: Albany, NY, USA, USA
Conference Date: 29 September 2009
Page(s): 1 - 4
ISBN (CD): 978-1-4244-3815-0
ISBN (Paper): 978-1-4244-3814-3
ISSN (Paper): 1944-0251
DOI: 10.1109/RTP.2009.5373466
Regular:

The processes of light absorption, generation of electron-hole pairs and thermal heating of thin-film silicon structures under the action of high-power nanosecond laser pulses are considered. The... View More

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