IEEE - Institute of Electrical and Electronics Engineers, Inc. - A novel array-based test methodology for local process variation monitoring

2009 IEEE International Test Conference (ITC)

Author(s): Tseng-Chin Luo ; Chao, M.C.-T. ; Wu, M.S.-Y. ; Kuo-Tsai Li ; Hsia, C.C. ; Huan-Chi Tseng ; Chuen-Uan Huang ; Yuan-Yao Chang ; Pan, S.C. ; Young, K.K.-L.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2009
Conference Location: Austin, TX, USA, USA
Conference Date: 1 November 2009
Page(s): 1 - 9
ISBN (CD): 978-1-4244-4867-8
ISBN (Paper): 978-1-4244-4868-5
ISSN (CD): 1089-3539
DOI: 10.1109/TEST.2009.5355656
Regular:

As process technologies continually advance, local process variation has greatly increased and gradually become one of the most critical factors for IC manufacturing. To monitor local process... View More

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