IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of high aspect ratio microcoils for electromagnetic actuators

2009 International Symposium on Micro-NanoMechatronics and Human Science (MHS)

Author(s): Noda, D. ; Setomoto, M. ; Hattori, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2009
Conference Location: Nagoya, Japan, Japan
Conference Date: 9 November 2009
Page(s): 15 - 20
ISBN (CD): 978-1-4244-5095-4
ISBN (Paper): 978-1-4244-5094-7
DOI: 10.1109/MHS.2009.5352070
Regular:

The demand for micro-fabricated components and devices is continually increasing. Actuators can occupy a large volume and be a large part of the weight of an overall system, and therefore need to... View More

Advertisement