IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of the maskless photolithography device with an LCD-projector for fabrication of micropatterned surfaces

2009 International Symposium on Micro-NanoMechatronics and Human Science (MHS)

Author(s): Itoga, K. ; Kobayashi, J. ; Yamato, M. ; Okano, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2009
Conference Location: Nagoya, Japan, Japan
Conference Date: 9 November 2009
Page(s): 368 - 372
ISBN (CD): 978-1-4244-5095-4
ISBN (Paper): 978-1-4244-5094-7
DOI: 10.1109/MHS.2009.5351890
Regular:

We developed the maskless photolithography device by modifying the optical system of an LCD projector and applied to cell micropatterning and fabrication of microchannels. Furthermore, we also... View More

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