IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microactuator using tensile thin film

2009 International Symposium on Micro-NanoMechatronics and Human Science (MHS)

Author(s): Sasaki, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2009
Conference Location: Nagoya, Japan, Japan
Conference Date: 9 November 2009
Page(s): 608 - 613
ISBN (CD): 978-1-4244-5095-4
ISBN (Paper): 978-1-4244-5094-7
DOI: 10.1109/MHS.2009.5351764
Regular:

The thin film is advantageous for preparing the compliant spring and structures with little mass. The surface micromachining can take these advantages. Since the film structures suffer from the... View More

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