IEEE - Institute of Electrical and Electronics Engineers, Inc. - Study on an efficient fabrication process for PMMA movable microstructures based on hot embossing and polishing processes

2009 International Symposium on Micro-NanoMechatronics and Human Science (MHS)

Author(s): Amava, S. ; Dzung Viet Dao ; Sugiyama, S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2009
Conference Location: Nagoya, Japan, Japan
Conference Date: 9 November 2009
Page(s): 565 - 568
ISBN (CD): 978-1-4244-5095-4
ISBN (Paper): 978-1-4244-5094-7
DOI: 10.1109/MHS.2009.5351742
Regular:

This paper reports our study on an efficient fabrication process for polymer microstructures utilizing hot embossing and polishing. In this paper, PMMA micro movable structures are set as the... View More

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