IEEE - Institute of Electrical and Electronics Engineers, Inc. - Defect inspection system by dot data

2009 International Symposium on Optomechatronic Technologies (ISOT 2009)

Author(s): Kayaba, H. ; Takauji, H. ; Kaneko, S. ; Toda, M. ; Kuno, K. ; Suganuma, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2009
Conference Location: Istanbul, Turkey, Turkey
Conference Date: 21 September 2009
Page(s): 191 - 196
ISBN (CD): 978-1-4244-4210-2
ISBN (Paper): 978-1-4244-4209-6
DOI: 10.1109/ISOT.2009.5326122
Regular:

We successfully develop a defect inspection method based on a robust method for matching the distance between points in three dimensions. The three-dimensional distance data of an object is... View More

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