IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design, fabrication, and performance analysis of MEMS mirror with sidewall electrodes

2009 International Symposium on Optomechatronic Technologies (ISOT 2009)

Author(s): Yanhui Bai ; Yeow, J.T.W. ; Wilson, B.C.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2009
Conference Location: Istanbul, Turkey, Turkey
Conference Date: 21 September 2009
Page(s): 179 - 184
ISBN (CD): 978-1-4244-4210-2
ISBN (Paper): 978-1-4244-4209-6
DOI: 10.1109/ISOT.2009.5326120
Regular:

A novel 2 Degree-of-Freedom (DOF) micro-electro-mechanical systems (MEMS) mirror with sidewall electrodes is presented. The paper analyzes the effects of the serpentine torsion bar width,... View More

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