IEEE - Institute of Electrical and Electronics Engineers, Inc. - Low cost polymer MEMS mirrors fabricated by photolithography and wet etching processes

2009 International Symposium on Optomechatronic Technologies (ISOT 2009)

Author(s): Oohira, F. ; Nakano, T. ; Sasaki, O. ; Terao, K. ; Suzuki, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2009
Conference Location: Istanbul, Turkey, Turkey
Conference Date: 21 September 2009
Page(s): 77 - 82
ISBN (CD): 978-1-4244-4210-2
ISBN (Paper): 978-1-4244-4209-6
DOI: 10.1109/ISOT.2009.5326102
Regular:

This paper presents two types of low cost mirror devices composed of the glass and the polymer material. These devices are new constructions composed of the inexpensive glass as the mirror... View More

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