IEEE - Institute of Electrical and Electronics Engineers, Inc. - Displacement analysis of micromirror composed of large deflection spiral beams

2009 International Symposium on Optomechatronic Technologies (ISOT 2009)

Author(s): Horie, M. ; Kamiya, D. ; Sadat, S.H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2009
Conference Location: Istanbul, Turkey, Turkey
Conference Date: 21 September 2009
Page(s): 59 - 64
ISBN (CD): 978-1-4244-4210-2
ISBN (Paper): 978-1-4244-4209-6
DOI: 10.1109/ISOT.2009.5326099
Regular:

We present a new two-axis spiral-shaped micromirror manipulator developed for free space optical switching. The actuator is an electrostatic actuator, comprised of two different parts, which are... View More

Advertisement