IEEE - Institute of Electrical and Electronics Engineers, Inc. - Heterogeneous integration towards an ultra-compact and thin optical displacement microsensor

2009 International Symposium on Optomechatronic Technologies (ISOT 2009)

Author(s): Higurashi, E. ; Suga, T. ; Sawada, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2009
Conference Location: Istanbul, Turkey, Turkey
Conference Date: 21 September 2009
Page(s): 209 - 214
ISBN (CD): 978-1-4244-4210-2
ISBN (Paper): 978-1-4244-4209-6
DOI: 10.1109/ISOT.2009.5326083
Regular:

This paper focuses on heterogeneous integration technology and its application in optical displacement microsensor. The integration is based on the Au-Au surface-activated bonding at a relatively... View More

Advertisement