IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and fabrication of SOI-based MEMS for mechanical memory storage

2009 IEEE International SOI Conference

Author(s): Parent, A. ; Tassetti, C.-M. ; Haussy, J. ; Tissot, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2009
Conference Location: Foster City, CA, USA, USA
Conference Date: 5 October 2009
Page(s): 1 - 2
ISBN (CD): 978-1-4244-5232-3
ISBN (Paper): 978-1-4244-4256-0
ISSN (Paper): 1078-621X
DOI: 10.1109/SOI.2009.5318777
Regular:

This paper presents the design and fabrication of SOI-based MEMS for mechanical memory storage (theoretical analysis and FEM) dedicated to reliability irradiative study. The memory data is the... View More

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