IEEE - Institute of Electrical and Electronics Engineers, Inc. - 40 to 85GHz power amplifier MMICs using an optical lithography based low cost GaAs PHEMT process

2009 European Microwave Integrated Circuits Conference (EuMIC)

Author(s): Fujii, K. ; Stanback, J. ; Morkner, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2009
Conference Location: Rome, Italy, Italy
Conference Date: 28 September 2009
Page(s): 503 - 506
ISBN (Paper): 978-1-4244-4749-7
Regular:

An optical photo lithography based 0.15µm GaAs PHEMT process and 2mil-substrate technology that enables high production throughput and low cost is described. The developed process achieved... View More

Advertisement