IEEE - Institute of Electrical and Electronics Engineers, Inc. - Precise rate of flow piezoelectric mini-pump with built-in self test

2009 9th International Conference on Electronic Measurement & Instruments (ICEMI)

Author(s): Zunqiang Fan ; Zhigang Yang ; Jingshi Dong ; Fengjun Tian ; Bin Jiang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2009
Conference Location: Beijing, China, China
Conference Date: 16 August 2009
ISBN (CD): 978-1-4244-3864-8
ISBN (Paper): 978-1-4244-3863-1
DOI: 10.1109/ICEMI.2009.5274578
Regular:

This paper presents a built-in self test pump actuated by piezoelectric bimorphs for fluidic systems. The sensor fabricated by MEMS ensures the flow to be 0.1μl/s. The pump is characterized... View More

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