IEEE - Institute of Electrical and Electronics Engineers, Inc. - Application of PSO algorithm and RBF neural network in electrical impedance tomography

2009 9th International Conference on Electronic Measurement & Instruments (ICEMI)

Author(s): Peng Wang ; Lili Xie ; Yicai Sun
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2009
Conference Location: Beijing, China, China
Conference Date: 16 August 2009
ISBN (CD): 978-1-4244-3864-8
ISBN (Paper): 978-1-4244-3863-1
DOI: 10.1109/ICEMI.2009.5274525
Regular:

To measure the resistivity distribution of semiconductor wafers, this article applies electrical impedance tomography (EIT) technology to semiconductor resistivity measurements. A new method of... View More

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