IEEE - Institute of Electrical and Electronics Engineers, Inc. - Thermal annealing of RF sputtered NbN

Author(s): W. Carter ; E. Cukauskas
Sponsor(s): IEEE Magnetics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 1987
Volume: 23
Page(s): 847 - 850
ISSN (Paper): 0018-9464
ISSN (Online): 1941-0069
DOI: 10.1109/TMAG.1987.1065019
Regular:

The effects of thermal annealing on RF sputtered NbCN films and completed NbN-based tunnel junctions has been investigated. The starting films were RF sputtered at temperatures from 150°C to 650°.... View More

Advertisement