IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design of a gain scheduled PID controller for precision stage in lithography

2009 International Conference on Mechatronics and Automation (ICMA)

Author(s): Mun-su Kim ; Jung-han Kim
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2009
Conference Location: Changchun, China, China
Conference Date: 9 August 2009
Page(s): 3,781 - 3,786
ISBN (CD): 978-1-4244-2693-5
ISBN (Paper): 978-1-4244-2692-8
DOI: 10.1109/ICMA.2009.5246178
Regular:

This paper presents a novel PID gain scheduling method using root mean square (RMS) for precise positioning stage in lithography process. Low perturbation in regulating control mode is a very... View More

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