IEEE - Institute of Electrical and Electronics Engineers, Inc. - The study of modeling and controlling for evaporation source in vacuum coating

2009 Chinese Control and Decision Conference (CCDC)

Author(s): Yanzhe Li ; Duowang Fan ; Shuben Yang ; Linggang Kong ; Qingfang Teng
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2009
Conference Location: Guilin, China, China
Conference Date: 17 June 2009
Page(s): 3,406 - 3,410
ISBN (CD): 978-1-4244-2723-9
ISBN (Paper): 978-1-4244-2722-2
DOI: 10.1109/CCDC.2009.5191901
Regular:

According to energy conversation and thermodynamics theory, the transfer function model of evaporation source in vacuum coating can be built up. With respect to the problem that parameters of... View More

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