IEEE - Institute of Electrical and Electronics Engineers, Inc. - Study of the performance comparison between micro-chamber quadrupole mass spectrometer and miniature quadrupole mass spectrometer

2009 IEEE International Vacuum Electronics Conference (IVEC)

Author(s): Mei Xiao ; Xiaobing Zhang ; Zhiwei Zhao
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2009
Conference Location: Rome, Italy, Italy
Conference Date: 28 April 2009
Page(s): 257 - 258
ISBN (CD): 978-1-4244-3501-2
ISBN (Paper): 978-1-4244-3500-5
DOI: 10.1109/IVELEC.2009.5193528
Regular:

In this paper, two different kinds of QMSs, micro-chamber quadrupole mass spectrometer(MCQMS) and miniature quadrupole mass spectrometer(MQMS), are compared from structure and their performance... View More

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